Carbon - Chromium - Silicon

Nathalie Lebrun, Pierre Perrot, An Serbruyns, Jean-Claude Tedenac

Introduction

The only phase equilibria studies existing for the C-Cr-Si system is related to the silicon and chromium rich region. Due to important technological applications, the main use of this phase diagram concerns the interfacial reactions between SiC and (Cr) for applications in microelectronic (high temperature semiconductor devices) or in structural materials (metal-composite matrix). Literature data up to 2000°C are partially given in the description of [2000Du2], but no complete review have be done up to now. The interactions between SiC and (Cr) were studied by several techniques and for different temperatures, [1972Pel, 1976Gas, 1979Bor, 1991Lya, 1994Sch, 1995Bha, 1996Bha, 1996Kos, 1998Nak]. They are listed in Table 1. A theoretical investigation of the interactions Metal-SiC may be found in [1991Lya]. In [1995Bha, 1996Bha...